Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition - ISBN 0849308267


ISBN 0849308267 : Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition
ISBN: 0849308267

Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition - (0849308267)

by: Marc J. Madou

Pub date: March 13, 2002
Publisher: CRC
ISBN: 0849308267
Binding: Hardcover
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Book Description:
Fundamentals of Microfabrication explores the science of miniaturization, including its methods and materials, from the historical to the state-of-the-art. The bestselling first edition met success not only with researchers and engineers, but also in advanced undergraduate and graduate classrooms around the world. The second edition has been extensively updated to include the most current information. The Applications section in particular has been expanded to provide more in-depth coverage of Bio-, RF-, High-temperature, and optical MEMS. Each chapter now contains a set of problems, and a solutions manual is available for qualifying course adoptions.




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